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Jenn Chow
Jenn Chow
Copper
Metallurgy
Aspect ratio (image)
Etching
Engineering
2
Papers
6
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Development of Cu etch process for advanced Cu interconnects
1998
IITC | International Interconnect Technology Conference
Yan Ye
Diana Ma
Allen Zhao
Peter Hsieh
Wayne Tu
Xiancan Deng
Gary Chu
Chun-mu
Jenn Chow
Peter K. Moon
Steta Sherman
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Citations (2)
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