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Allen Zhao
Allen Zhao
Copper
Engineering
Metallurgy
Electronic engineering
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5
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13
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Plasma Diagnostics: Use and Justification in an Industrial Environment
1999
Japanese Journal of Applied Physics
Peter K. Loewenhardt
Wade Zawalski
Yan Ye
Allen Zhao
Tim R. Webb
Daisuke Tajima
Diana X. Ma
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Citations (7)
Development of Cu etch process for advanced Cu interconnects
1998
IITC | International Interconnect Technology Conference
Yan Ye
Diana Ma
Allen Zhao
Peter Hsieh
Wayne Tu
Xiancan Deng
Gary Chu
Chun-mu
Jenn Chow
Peter K. Moon
Steta Sherman
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Citations (2)
Hybrid conductor and radio-frequency plasma reactor with multi-radius dome ceilings
1996
Hiroji Hanawa
Peter K. Loewenhardt
Diana Xiaobing Ma
Philip M. Salzman
Gerald Zheyao Yin
Allen Zhao
tuyao aren
tueyao in zierarudo
syaobin maa daiana
kei . roouenhaado piitaa
hanawa hirozi
emu . sarutuman firippu
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