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Hsiang Ting Yeh
Hsiang Ting Yeh
ASML Holding
Engineering
Electronic engineering
Logic gate
Silicon on insulator
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2
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2
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Rapid In-line Process Window Characterization Using Voltage Contrast Test Structures for Advanced FinFET Technology Development
2019
ASMC | Advanced Semiconductor Manufacturing Conference
Weihong Gao
Jeonghee Kim
Hsiao-Chi Peng
Chih-Chung Huang
Oliver D. Patterson
Yu-Chi Su
Hsiang Ting Yeh
Sean Starr-baier
Haokun Hu
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Shortest path CD measurement using contour extraction
2018
ASMC | Advanced Semiconductor Manufacturing Conference
Oliver D. Patterson
Bart Seefeldt
Wan-Hsiang Liang
Haokun Hu
Joan Chen
Yu-Chi Su
Hsiang Ting Yeh
Pengcheng Zhang
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