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S. Pokrant
S. Pokrant
NXP Semiconductors
Analytical chemistry
Semiconductor
Materials science
Electronic engineering
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3
Papers
5
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Off-axis electron holography for the analysis of nm-scale semiconductor devices
2008
D Cooper
R. Truche
L. Clement
S. Pokrant
A. Chabli
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In-line TEM sample preparation and wafer return strategy for rapid yield learning
2006
N. Bicaïs-Lépinay
F. André
S. Brevers
P. Guyader
C. Trouiller
L.F.Tz. Kwakman
S. Pokrant
D. Verkleij
R. Schampers
L. Ithier
E. Sicurani
C. Wyon
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Gate Spacer Width Monitoring Study with Scatterometry Based on Spectroscopic Ellipsometry
2005
Characterization and Metrology for ULSI Technology
Vincent Vachellerie
Stephanie Kremer
A. Elazami
Pierre Morin
C Julien
D. Duca
D. Guiheux
N. Bicais
S. Pokrant
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Citations (2)
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