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Takashi Orita
Takashi Orita
Metalorganic vapour phase epitaxy
Semiconductor
Nitride
Chlorine
Chemistry
5
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11
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Segment design for opening reinforcement at the connecting galleries to deep large cross-section road tunnel
2021
Takashi Orita
Hideaki Adachi
Taro Kiwaki
Kiyotaka Nagahama
Fei Go
Tooru Muta
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Multiwafer atmospheric-pressure MOVPE reactor for nitride semiconductors and ex-situ dry cleaning of reactor components using chlorine gas for stable operation
2008
Physica Status Solidi (c)
Hiroki Tokunaga
Yasushi Fukuda
Akinori Ubukata
Kazutada Ikenaga
Yoshiaki Inaishi
Takashi Orita
Satoshi Hasaka
Yuichiro Kitamura
Akira Yamaguchi
Shuichi Koseki
Kunimasa Uematsu
Nobuyasu Tomita
Nakao Akutsu
Koh Matsumoto
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Ex situ dry cleaning of reactor component of nitride metal organic chemical vapor deposition using chlorinated gases
2007
Journal of Crystal Growth
Yasushi Fukuda
Takashi Orita
Nakao Akutsu
Kazutada Ikenaga
Syuuichi Koseki
Koh Matsumoto
Satoshi Hasaka
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206 圧痕の形状変化に基づく材料の変形の3次元評価法に関する有限要素解析(材料力学I)
2007
Makoto Uchida
Takashi Orita
Yoshinobu Sugimoto
Naoya Tada
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Development of Slow Start Safety Cylinder Valve to Inhibit Adiabatic Compression for Oxidized Gases
2006
ISSM | International Symposium on Semiconductor Manufacturing
Takashi Orita
Michio Yamaji
Tsutomu Shinohara
Tomohiro Nakata
Masao Koizumi
Satoshi Hasaka
Hiroyuki Nakabayashi
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