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Kunimasa Uematsu
Kunimasa Uematsu
Analytical chemistry
Atmospheric pressure
Chemistry
Inorganic chemistry
Growth rate
5
Papers
45
Citations
0.01
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High Growth Rate MOVPE
2010
Koh Matsumoto
Hiroki Tokunaga
Akinori Ubukata
Kazutada Ikenaga
Yasushi Fukuda
Yoshiki Yano
Toshiya Tabuchi
Yuichiro Kitamura
Shuichi Koseki
Akira Yamaguchi
Kunimasa Uematsu
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Citations (1)
High growth rate metal organic vapor phase epitaxy GaN
2008
Journal of Crystal Growth
Koh Matsumoto
Hiroki Tokunaga
Akinori Ubukata
Kazumasa Ikenaga
Yasushi Fukuda
Toshiya Tabuchi
Yuichiro Kitamura
Shuichi Koseki
Akira Yamaguchi
Kunimasa Uematsu
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Citations (20)
Multiwafer atmospheric-pressure MOVPE reactor for nitride semiconductors and ex-situ dry cleaning of reactor components using chlorine gas for stable operation
2008
Physica Status Solidi (c)
Hiroki Tokunaga
Yasushi Fukuda
Akinori Ubukata
Kazutada Ikenaga
Yoshiaki Inaishi
Takashi Orita
Satoshi Hasaka
Yuichiro Kitamura
Akira Yamaguchi
Shuichi Koseki
Kunimasa Uematsu
Nobuyasu Tomita
Nakao Akutsu
Koh Matsumoto
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Citations (8)
Application of Penta-Di-Methyl-Amino-Tantalum to a Tantalum Source in Chemical Vapor Deposition of Tantalum Oxide Films
1991
Japanese Journal of Applied Physics
Toshiya Tabuchi
Yoshinori Sawado
Kunimasa Uematsu
Shohei Koshiba
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Citations (16)
A New Reactor for Metalorganic Chemical Vapor Deposition Equipped with an Internal Rotary Flow Selector
1991
Japanese Journal of Applied Physics
Naoki Wada
Shiro Sakai
Yoshihiro Ueta
Shohei Koshiba
Kunimasa Uematsu
Kenji Higashiyama
Yoshihiro Shintani
Takayuki Yuasa
Masayoshi Umeno
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Citations (0)
1