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Yoshiaki Inaishi
Yoshiaki Inaishi
Metalorganic vapour phase epitaxy
Doping
Nitride
Chemistry
Chemical engineering
3
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46
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Multiwafer atmospheric-pressure MOVPE reactor for nitride semiconductors and ex-situ dry cleaning of reactor components using chlorine gas for stable operation
2008
Physica Status Solidi (c)
Hiroki Tokunaga
Yasushi Fukuda
Akinori Ubukata
Kazutada Ikenaga
Yoshiaki Inaishi
Takashi Orita
Satoshi Hasaka
Yuichiro Kitamura
Akira Yamaguchi
Shuichi Koseki
Kunimasa Uematsu
Nobuyasu Tomita
Nakao Akutsu
Koh Matsumoto
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Citations (8)
Carbon-Doped Silicon Oxide Films with Hydrocarbon Network Bonds for Low-k Dielectrics: Theoretical Investigations
2007
Japanese Journal of Applied Physics
Nobuo Tajima
Takahisa Ohno
Tomoyuki Hamada
Katsumi Yoneda
Seiichi Kondo
Nobuyoshi Kobayashi
Manabu Shinriki
Yoshiaki Inaishi
Kazuhiro Miyazawa
Kaoru Sakota
Satoshi Hasaka
Minoru Inoue
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Citations (24)
Performance of multiwafer reactor GaN MOCVD system
2000
Journal of Crystal Growth
Hiroki Tokunaga
H. Tan
Yoshiaki Inaishi
Takayuki Arai
Akira Yamaguchi
J. Hidaka
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Citations (14)
1