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Hiroshi Masusaki
Hiroshi Masusaki
Chemistry
Physics
Molecule
Analytical chemistry
Semiconductor device fabrication
6
Papers
7
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Quantum chemical mechanism of heterogeneous reaction between trichlorosilane and adsorbed water
2003
Japanese Journal of Applied Physics
Toshiki Makita
Koichi Nakamura
Akitomo Tachibana
Hiroshi Masusaki
Koh Matsumoto
Yoshio Ishihara
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Semiconductor manufacturing processes and semiconductor manufacturing equipment
2001
Hiroyuki Hasegawa
Tomonori Yamaoka
Yoshio Ishihara
Hiroshi Masusaki
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Semiconductor manufacturing processes
2001
Hiroyuki Hasegawa
Yoshio Ishihara
Hiroshi Masusaki
Tomonori Yamaoka
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CVD-Einrichtung zum Bilden eines Halbleiterfilms auf einem Wafer und Verfahren zum Beurteilen von Wartungszeiten einer CVD- Einrichtung
2000
Hiroyuki Hasegawa
Yoshio Ishihara
Hiroshi Masusaki
Takayuki Satou
Katsumasa Suzuki
Hiroki Tokunaga
Tomonori Yamaoka
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Analyse de gaz par spectrochimie infrarouge et appareil utilise
1995
Yoshio Ishihara
Hiroshi Masusaki
Shang-Qian Wu
Koh Matsumoto
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Trace moisture measurement in HCl gas by near-infrared diode LASER spectroscopy
1995
ISSM | International Symposium on Semiconductor Manufacturing
Yoshio Ishihara
Hiroshi Masusaki
Shang-Qian Wu
Koh Matsumoto
Tetsuya Kimijima
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