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Victor Aristov
Victor Aristov
GlobalFoundries
Engineering
Electronic engineering
Wafer
Multiple patterning
Optoelectronics
3
Papers
1
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0
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Integration of Computer-Aided Design (CAD) Information into a Defect-Review SEM Platform and Design Based Automatic Defect Classification : DI: Defect Inspection and Reduction
2019
ASMC | Advanced Semiconductor Manufacturing Conference
Teresa A. Esposito
Jay Shah
A. Jain
Felix Levitov
John G. Sheridan
Shashi Shekhar
Shih Hui Jen
Victor Aristov
Hoang Nguyen
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Mask qualification of a shifted gate contact issue by physical e-beam inspection and high landing energy SEM review : DI: Defect Inspection and Reduction
2019
ASMC | Advanced Semiconductor Manufacturing Conference
John G. Sheridan
Hsiao-Chi Peng
Chih-Chung Huang
Victor Aristov
Hoang Nguyen
Yashdeep Khopkar
A. Jain
Jay Shah
Felix Levitov
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Inline SEM imaging of buried defects using novel electron detection system: DI: Defect inspection and reduction
2018
ASMC | Advanced Semiconductor Manufacturing Conference
Abhinav Jain
John G. Sheridan
Felix Levitov
Victor Aristov
Shay Yasharzade
Hoang Nguyen
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