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Shogo Motegi

Saitama University

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Evolution of morphology and crystalline quality of DC-sputtered AlN films with high-temperature annealing

2019 Japanese Journal of Applied Physics
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Fabrication of AlGaN deep-UV LEDs on DC-sputter based AlN films

2019 The Japan Society of Applied Physics
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AlN template using DC sputtered AlN films with high-temperature annealing

2018 The Japan Society of Applied Physics
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