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AlN template using DC sputtered AlN films with high-temperature annealing
AlN template using DC sputtered AlN films with high-temperature annealing
2018
Yosuke Mogami
Shogo Motegi
Atsushi Osawa
Kazuto Osaki
Yukitake Tanioka
Atsushi Maeoka
Masafumi Jo
Noritoshi Maeda
Hiroyuki Yaguchi
Hideki Hirayama
Keywords:
Materials science
annealing
Optoelectronics
Sputtering
Correction
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