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Fabrication of AlGaN deep-UV LEDs on DC-sputter based AlN films
Fabrication of AlGaN deep-UV LEDs on DC-sputter based AlN films
2019
Yosuke Mogami
Shogo Motegi
Atsushi Osawa
Kazuto Ozaki
Yukitake Tanioka
Atsushi Maeoka
Masafumi Jo
Noritoshi Maeda
Hiroyuki Yaguchi
Hideki Hirayama
Keywords:
Materials science
Sputtering
Optoelectronics
Fabrication
Light-emitting diode
Correction
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