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Etching of amorphous carbon layer (a-C) by fluorine and fluorocarbon ions (F + , CF + , CF 3 + )
Etching of amorphous carbon layer (a-C) by fluorine and fluorocarbon ions (F + , CF + , CF 3 + )
2017
Kazuhiro Karahashi
Hu Li
Kentaro Yamada
Tomoko Ito
Satoshi Numazawa
Ken Machida
Kiyoshi Ishikawa
Satoshi Hamaguchi
Keywords:
Amorphous carbon
Etching
Ion
Fluorine
Fluorocarbon
Organic chemistry
Chemistry
Inorganic chemistry
Materials science
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