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Thin Film Challenges in 28nm Technology Node
Thin Film Challenges in 28nm Technology Node
2012
Beichao Zhang
Bin Zhang
Haibo Xiao
Hao Deng
Hao Tong
Jingjing Tan
Ming Zhou
Nicola Li
Shibi Guo
Wanchun Ren
Xiaona Wang
Xuezheng Jing
Yang Hui Xiang
Yanlei Ping
Yu Bao
Ziying Zhang
Zengtao Wang
Wei Lu
Jinggang Wu
Keywords:
Thin film
Optoelectronics
Materials science
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