Backside E-Beam Probing on Nano scale devices

Rudolf Schlangen,R. Leihkauf,Uwe Kerst,Christian Boit,Rajesh Jain,Tahir Malik,Keneth R. Wilsher,Ted R. Lundquist,Bernd Krüger

Backside E-Beam Probing on Nano scale devices

2007

Rudolf Schlangen
R. Leihkauf
Uwe Kerst
Christian Boit
Rajesh Jain
Tahir Malik
Keneth R. Wilsher
Ted R. Lundquist
Bernd Krüger

IC debug with E-beam probing is presented in an innovative application accessing the active device directly from chip backside after FIB preparation. The potential of this approach in nanoscale and gigahertz dimensions is evaluated.

Keywords:

Nanoscopic scale
Electronic engineering
Electron beam processing
Computer science
Nanoelectronics
electron beam testing
Chip
active devices

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