Procedure to obtain higher than 14% efficient thin film CdS/CdTe solar cells activated with HCF2Cl gas

Abstract This work reports a process used to obtain CdS/CdTe thin film solar cells with high efficiencies between 14% and 14.6%. The procedure consists of sequentially depositing by RF sputtering and close space sublimation (CSS) of several layers onto a glass substrate, configured as glass/ITO/ZnO/CdS/CdTe/Cu/Mo. The CdTe layer was deposited by CSS at low substrate temperature (500 °C) under Ar–O 2 atmosphere and the activation process is performed with a mixture of Freon gas (HCF 2 Cl) and other gases.