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Hiroshi Watanabe
Hiroshi Watanabe
Dai Nippon Printing
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Refractive index
Exposure latitude
Lithography
Optics
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Mask blank mask blank with a negative resist film, the phase shift mask and method for manufacturing a body formed by a pattern using the same
2014
Takashi Adachi
Youichi Miura
Hideyoshi Takamizawa
Hayano Katsuya
Youhei Ohkawa
Hiroshi Watanabe
Ayako Tani
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Mask blank material optimization impact on leading-edge ArF lithography
2011
Kei Mesuda
Hiroshi Watanabe
Katsuya Hayano
Eiji Tsujimoto
Hideyoshi Takamizawa
Toshio Ohhashi
Naruo Sakasai
Shintaro Kudo
Tomoyuki Matsuyama
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22nm node ArF lithography performance improvement by utilizing mask 3D topography: controlled sidewall angle
2011
Hiroshi Watanabe
Kei Mesuda
Katsuya Hayano
Eiji Tsujimoto
Hideyoshi Takamizawa
Toshio Ohhashi
Naruo Sakasai
Shintaro Kudo
Tomoyuki Matsuyama
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