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Hayano Katsuya
Hayano Katsuya
Polymer chemistry
Photoresist
Blank
Chemistry
Phase-shift mask
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Mask blank mask blank with a negative resist film, the phase shift mask and method for manufacturing a body formed by a pattern using the same
2014
Takashi Adachi
Youichi Miura
Hideyoshi Takamizawa
Hayano Katsuya
Youhei Ohkawa
Hiroshi Watanabe
Ayako Tani
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