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Meela Stone
Meela Stone
Cycling
Germanium
Ion implantation
Doping
Dopant
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Germanium operation on the GSDIII/LED and ultra high current ion implanters
2002
Brian S. Freer
Hans Rutishauser
Daniel R. Tieger
Michael A. Graf
Meela Stone
Alex S. Perel
Hiroshi Matsushita
Hiroyuki Muto
Mitsuaki Kabasawa
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