Old Web
English
Sign In
Acemap
>
authorDetail
>
Abe Ghanbari
Abe Ghanbari
Resist
Throughput
Electronic engineering
Engineering
Digital pattern generator
5
Papers
11
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (5)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Initial benchmarking of a new electron-beam raster pattern generator for 130-100 nm maskmaking
2000
Charles A. Sauer
Frank E. Abboud
Sergey Babin
Varoujan Chakarian
Abe Ghanbari
Robert Innes
David Trost
Frederick Raymond
Show All
Source
Cite
Save
Citations (3)
130~100nmマスク製造のための先進パターン発生機の要素 | 文献情報 | J-GLOBAL 科学技術総合リンクセンター
2000
Chakarian
Charles A. Sauer
Bassam Shamoun
Frank Chilese
David Trošt
Marek Zywno
Ulrich Hofmann
Robin Teitzel
Richard Prior
Frederick Raymond
Abe Ghanbari
Frank E. Abboud
Show All
Source
Cite
Save
Citations (0)
Elements of an advanced pattern generator for 130- to 100-nm maskmaking
2000
Varoujan Chakarian
Charles A. Sauer
Bassam Shamoun
Frank Chilese
David Trost
Marek Zywno
Ulrich Hofmann
Robin Teitzel
Richard Prior
Frederick Raymond
Abe Ghanbari
Frank E. Abboud
Show All
Source
Cite
Save
Citations (2)
Design considerations for an electron-beam pattern generator for the 130-nm generation of masks
1999
Frank E. Abboud
Sergey Babin
Varoujan Chakarian
Abe Ghanbari
Robert Innes
Frederick Raymond
Allan L. Sagle
Charles A. Sauer
Show All
Source
Cite
Save
Citations (4)
System architecture choices for an advanced mask writer (100 to 130 nm)
1999
Varoujan Chakarian
Frederick Raymond
Charles A. Sauer
Sergey Babin
Robert Innes
Allan L. Sagle
Ulrich Hofmann
Bassam Shamoun
David Trost
Abe Ghanbari
Frank E. Abboud
Show All
Source
Cite
Save
Citations (2)
1