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Frank Chilese
Frank Chilese
Electronic engineering
Digital pattern generator
Systems design
Engineering drawing
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3
Papers
7
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Predictive and corrective model for bulk heating distortion in photomasks
2000
Bassam Shamoun
David Trost
Frank Chilese
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130~100nmマスク製造のための先進パターン発生機の要素 | 文献情報 | J-GLOBAL 科学技術総合リンクセンター
2000
Chakarian
Charles A. Sauer
Bassam Shamoun
Frank Chilese
David Trošt
Marek Zywno
Ulrich Hofmann
Robin Teitzel
Richard Prior
Frederick Raymond
Abe Ghanbari
Frank E. Abboud
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Elements of an advanced pattern generator for 130- to 100-nm maskmaking
2000
Varoujan Chakarian
Charles A. Sauer
Bassam Shamoun
Frank Chilese
David Trost
Marek Zywno
Ulrich Hofmann
Robin Teitzel
Richard Prior
Frederick Raymond
Abe Ghanbari
Frank E. Abboud
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Citations (2)
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