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Takahiro Sawada
Takahiro Sawada
IFS AB
Materials science
Optoelectronics
Beam (structure)
Etching
Etching (microfabrication)
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Atomic Layer Selective GaN/SiN Etching by HBr Neutral Beam
2021
The Japan Society of Applied Physics
Takahiro Sawada
Daisuke Ohori
Kenta Sugawara
Masaya Okada
Ken Nakata
Kazutaka Inoue
Daisuke Sato
Seiji Samukawa
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Defect-free Atomic Layer Etching of GaN with Neutral-Beam Etching
2020
The Japan Society of Applied Physics
Takahiro Sawada
Daisuke Ohori
Kenta Sugawara
Masaya Okada
Daisuke Satou
Hideyuki Kurihara
Seiji Samukawa
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