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Defect-free Atomic Layer Etching of GaN with Neutral-Beam Etching
Defect-free Atomic Layer Etching of GaN with Neutral-Beam Etching
2020
Takahiro Sawada
Daisuke Ohori
Kenta Sugawara
Masaya Okada
Daisuke Satou
Hideyuki Kurihara
Seiji Samukawa
Keywords:
Materials science
Etching
Optoelectronics
Beam (structure)
defect free
Correction
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