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A. Kabeya
A. Kabeya
Toshiba
Data conversion
Opus
Optics
Lithography
Data compaction
2
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1
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Pattern-data preparation method to enhance high-throughput mask fabrication in variable-shaped e-beam writing system
1996
Shigehiro Hara
Eiji Murakami
Shunko Magoshi
Kiyomi Koyama
Hirohito Anze
Yoji Ogawa
A. Kabeya
S. Ooki
Tamaki Saito
T. Fujii
Shinji Sakamoto
Hiromi Suzuki
Mitsuhiro Yano
Sadakazu Watanabe
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Enhancing a hierarchical, parallel electron beam data conversion processor toward 1 Gbit memory lithography
1995
Journal of Vacuum Science & Technology B
Kiyomi Koyama
Susumu Watanabe
Tamaki Saito
Shigehiro Hara
Eiji Murakami
Shunko Magoshi
K. Yano
Hiromi Suzuki
A. Kabeya
S. Ohki
T. Fujii
Shinji Sakamoto
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