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Shinji Sakamoto
Shinji Sakamoto
Toshiba
Data conversion
Electronic engineering
Computer Aided Design
Optics
Analytical chemistry
5
Papers
7
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Pattern-data preparation method to enhance high-throughput mask fabrication in variable-shaped e-beam writing system
1996
Shigehiro Hara
Eiji Murakami
Shunko Magoshi
Kiyomi Koyama
Hirohito Anze
Yoji Ogawa
A. Kabeya
S. Ooki
Tamaki Saito
T. Fujii
Shinji Sakamoto
Hiromi Suzuki
Mitsuhiro Yano
Sadakazu Watanabe
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Enhancing a hierarchical, parallel electron beam data conversion processor toward 1 Gbit memory lithography
1995
Journal of Vacuum Science & Technology B
Kiyomi Koyama
Susumu Watanabe
Tamaki Saito
Shigehiro Hara
Eiji Murakami
Shunko Magoshi
K. Yano
Hiromi Suzuki
A. Kabeya
S. Ohki
T. Fujii
Shinji Sakamoto
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Citations (1)
High-Speed Electron Beam Data Conversion System Combining Hierarchical Operation with Parallel Processing
1992
Japanese Journal of Applied Physics
Shunko Magoshi
Kiyomi Koyama
Osamu Ikenaga
Susumu Watanabe
Tamaki Saito
Shinji Sakamoto
Shin-ichiro Ooki
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Citations (3)
Shape Data Operations for VSB LB Data Conversion Using CAD Tools
1989
Japanese Journal of Applied Physics
Kiyomi Koyama
Osamu Ikenaga
Tadahiro Takigawa
Yuuichi Kobayashi
Shinji Sakamoto
Susumu Watanabe
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Citations (3)
Shape Data Operations for VSB EB Data Conversion Using CAD Tools : Lithography Technology
1989
Kiyomi Koyama
Osamu Ikenaga
Tadahiro Takifawa
Yuuichi Kobayashi
Shinji Sakamoto
Susumu Watanabe
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