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R. Dechanoz
R. Dechanoz
Nanowire
Optoelectronics
Lithography
Logic gate
Transistor
2
Papers
1
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0
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Hydrogen silsesquioxane tri-dimensional advanced patterning concepts for high density of integration in sub-7 nm nodes
2017
EUROSOI-ULIS | Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon
L. Gaben
V. Balan
C. Euvrard
S. Pauliac
Jacques-Alexandre Dallery
Jessy Bustos
R. Dechanoz
B. Hemard
L. Koscianski
X. Bossy
C. Arvet
C. Vizioz
S. Barnola
C. Perrot
J. Sturm
Y. Exbrayat
V. Loup
P. Besson
B Perrin
B. Previtali
M.-P. Samson
S. Barraud
S. Monfray
F. Bœuf
T. Skotnicki
Francis Balestra
M. Vinet
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HSQ Lithography for Nanowire First Integration: an Interesting Alternative for Gate Last Fabrication of Sub-7nm Stacked Nanowire FETs.
2016
The Japan Society of Applied Physics
L. Gaben
S. Pauliac
Jacques-Alexandre Dallery
J. Bustos
R. Dechanoz
B. Hemard
L. Koscianski
X. Bossy
M.-P. Samson
S. Barraud
Stephane Monfray
Frédéric Boeuf
Thomas Skotnicki
Francis Balestra
M. Vinet
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