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Shizhi Lyu
Shizhi Lyu
Mentor Graphics
Computer science
Wafer
Algorithm
Critical dimension
Control theory
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2024
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A novel method to fast fix the post OPC weak-points through Calibre eqDRC application
2018
YaDong Jin
Shizhi Lyu
Cong Lu
Zexi Deng
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Mask process correction method comparison and study: CD-SEM box versus standard correction method
2017
Mingjing Tian
Shizhi Lyu
Eric Guo
Ingo Bork
Peter Buck
Yifan Li
Delin Mo
Cong Lu
Kushlendra Mishra
Anil Parchuri
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