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guoyiluan
guoyiluan
Materials science
Electronic engineering
Thermal stability
Carbon
Implant
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Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe films
2015
Microelectronic Engineering
Qingbo Liu
Guilei Wang
guoyiluan
Xingxing Ke
Chao Zhao
Jun Luo
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Impact of pattern dependency of SiGe layers grown selectively in source/drain on the performance of 22nm node pMOSFETs
2015
Solid-state Electronics
Guilei Wang
Yefeng Xu
Jun Luo
guoyiluan
Zhangliang Qin
tangzhaoyun
Huaxiang Yin
Junfeng Li
Yan Jiang
Huilong Zhu
Chao Zhao
Dapeng Chen
Tianchun Ye
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Optimization of a two-step Ni(5% Pt) germanosilicidation process and the redistribution of Pt in Ni(Pt)Si1-xGex Germanosilicide
2015
Vacuum
Qingbo Liu
Guilei Wang
guoyiluan
Xingxing Ke
Chao Zhao
Jun Luo
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Simulation and characterization of stress in FinFETs using novel LKMC and nanobeam diffraction methods
2015
guoyiluan
Guilei Wang
Chao Zhao
Jun Luo
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Integration of highly-strained SiGe materials in 14nm and beyond nodes FinFET technology
2014
Solid-state Electronics
Guilei Wang
Jun Luo
guoyiluan
Tao Chen
Huaxiang Yin
Huilong Zhu
Junfeng Li
Chao Zhao
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