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Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe films
Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe films
2015
Qingbo Liu
Guilei Wang
guoyiluan
Xingxing Ke
Chao Zhao
Jun Luo
Keywords:
Thermal stability
Carbon
Implant
Composite material
Materials science
Correction
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