Old Web
English
Sign In
Acemap
>
authorDetail
>
Kazuto Oonou
Kazuto Oonou
Proximity effect (audio)
Repeatability
Lithography
Electron-beam lithography
Beam (structure)
1
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
CD error budget of CP exposure
2011
Masaki Kurokawa
Hideaki Isobe
Masahiro Takizawa
Keita Bunya
Hideaki Komami
Akio Yamada
Kazuhiko Shiomitsu
Kazuto Oonou
Show All
Source
Cite
Save
Citations (0)
1