CD error budget of CP exposure
2011
We evaluate the projection fidelity of the Cell Projection (CP) using the Multi column cell (MCC) proof of concept
(POC) tool [1-6]. The CP technology is originally developed as a method for reducing the shot counts of E-beam
lithography systems. However, the higher repeatability of the shape is expected because the fixed size CP mask openings
are used for each pattern. In the process of writing patterns by E-beam, the pattern deformation is inevitable due to the
beam blur, proximity effect, and beam shaping error. If the model of beam deformation is established, the correction for
the pattern deformation by modifications of CP mask opening shape can be carried out instead of additional shots. As a
result, the shot count will be reduced.
In this paper, we focused on Corner Rounding (CR) and Line End Shortening (LES) as two-dimensional properties of
pattern deformation. Two-dimensional deformation should be decomposed in two components. One is the deformation in
the process of CP mask manufacturing, and another is the deformation in the exposure process by e-beam writer tool. CP
mask has been manufactured, measured and analyzed by Toppan printing. And using the CP mask, the exposure process
error is measured by Advantest. By comparing the results, we evaluate the net amount of CP deformation caused in
exposure process. Finally we confirmed the two-dimensional deformation is predictable by blur length that is obtained
by one-dimensional CD-dose curve analysis.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI