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Kazuhiko Shiomitsu
Kazuhiko Shiomitsu
Materials science
Proximity effect (audio)
Repeatability
Lithography
Electron-beam lithography
2
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CD error budget of CP exposure
2011
Masaki Kurokawa
Hideaki Isobe
Masahiro Takizawa
Keita Bunya
Hideaki Komami
Akio Yamada
Kazuhiko Shiomitsu
Kazuto Oonou
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Procédé de fabrication d'une micro-aiguille
2007
Kazuhiko Shiomitsu
Hiroshi Sugimura
Toshiaki Kurosu
Gaku Suzuki
Takao Tomono
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