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Maamar Sai
Maamar Sai
Shallow trench isolation
Trench
Electronic engineering
Static random-access memory
CMOS
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Trench isolation technology with 1 μm depth n- and p-wells for a full-CMOS SRAM cell with a 0.4 μm n+/p+ spacing
1994
K. Ishimaru
Hiroshi Gojohbori
Hideki Koike
Yoshinobu Unno
Maamar Sai
F. Matsuoka
Masakazu Kakumu
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