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hideaki yama saki
hideaki yama saki
Metal
Materials science
Shower
Evaporator
Evaporation
3
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2024
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Metal - low pressure deposition of ruthenium and rhenium metal layer from carbonyl precursor
2005
gidottei emanyueru
makufiirii fenton aaru .
maruhotora sandora zii .
mosuka enriko
reusinku gaato ziei .
hideaki yama saki
yumiko kouno
kenzi suzuki
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Metal - method of depositing a metal layer from the carbonyl precursor.
2004
makkufiirii fenton aaru .
maruhotora sandora zii .
reusinku jaato ziei .
atusi gomi
hideaki yama saki
masahito sugiura
tukasa matuda
yumiko kouno
tatuo hatano
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Apparatus and method for carrying the precursor vapor from the low vapor pressure liquid supply source to cvd chamber
2000
vezan vu a nsan
hiruman josefu teii
yasaaru taguraru
ken'iti kubo
hideki yosikawa
yasuhiko kozima
hideaki yama saki
yumiko kouno
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