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Florian Schnabel
Florian Schnabel
Materials science
Copper interconnect
Electrical resistance and conductance
Thermal stability
Electronic engineering
2
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2
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Cleans for Al vias in a 0.175 /spl mu/m dual damascene process
1999
IITC | International Interconnect Technology Conference
Jeffrey P. Gambino
Lawrence A. Clevenger
Gregory Costrini
Florian Schnabel
R. Ravikumar
David M. Dobuzinsky
Roy C. Iggulden
Chester T. Dziobkowski
Horatio S. Wildman
J. P. Benedict
J. Bruley
Anthony G. Domenicucci
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Planarization of dual-damascene post-metal-CMP structures
1999
IITC | International Interconnect Technology Conference
Chenting Lin
Lawrence A. Clevenger
Florian Schnabel
Fen-Fen Jamin
D. Dobuzinski
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