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Carl Stahlhammer
Carl Stahlhammer
Optics
X-ray lithography
Lithography
Image sensor
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3
Papers
12
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X-ray lithography for ⩽100 nm ground rules in complex patterns
1997
Journal of Vacuum Science & Technology B
Scott Daniel Hector
Victor Pol
Azalia A. Krasnoperova
Juan R. Maldonado
Alex L. Flamholz
D. A. Heald
Carl Stahlhammer
Dan Galburt
Ralph Amodeo
Tom Donohue
Shalom J. Wind
James Buchigniano
R. Viswanathan
Mumit Khan
Srinivas B. Bollepalli
Franco Cerrina
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Citations (11)
Evaluation of the Defense Advanced Lithography Program (DALP) x-ray lithography aligner
1997
Alek C. Chen
Alex L. Flamholz
Azalia A. Krasnoperova
Robert P. Rippstein
Ben R. Vampatella
George A. Gomba
Robert H. Fair
W. Chu
Vincent Dimilia
J. P. Silverman
R. J. Amodeo
D. A. Heald
P. C. Kochersperger
Carl Stahlhammer
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Citations (1)
Evaluation of the Defense Advanced Lithography Program (DALP) x-ray lithography aligner
1997
Alek C. Chen
Alex L. Flamholz
Azalia A. Krasnoperova
Robert P. Rippstein
Ben R. Vampatella
G. A. Gomba
Robert H. Fair
W. Chu
Vincent Dimilia
J. P. Silverman
R. J. Amodeo
D. A. Heald
P. C. Kochersperger
Carl Stahlhammer
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1