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P. C. Kochersperger
P. C. Kochersperger
Image sensor
X-ray lithography
Beamline
Wafer
Lithography
2
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1
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0
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Evaluation of the Defense Advanced Lithography Program (DALP) x-ray lithography aligner
1997
Alek C. Chen
Alex L. Flamholz
Azalia A. Krasnoperova
Robert P. Rippstein
Ben R. Vampatella
George A. Gomba
Robert H. Fair
W. Chu
Vincent Dimilia
J. P. Silverman
R. J. Amodeo
D. A. Heald
P. C. Kochersperger
Carl Stahlhammer
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Citations (1)
Evaluation of the Defense Advanced Lithography Program (DALP) x-ray lithography aligner
1997
Alek C. Chen
Alex L. Flamholz
Azalia A. Krasnoperova
Robert P. Rippstein
Ben R. Vampatella
G. A. Gomba
Robert H. Fair
W. Chu
Vincent Dimilia
J. P. Silverman
R. J. Amodeo
D. A. Heald
P. C. Kochersperger
Carl Stahlhammer
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