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B. Remaki

Institut national des sciences Appliquées de Lyon

36

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671

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Temperature dependence of the electromechanical characteristics of superconducting RF-MEMS switches

2015 Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems
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High-density oxidized porous silicon

2012 Semiconductor Science and Technology
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Local anodization of silicon as a step for electrical isolation process

2010 MSE | Microelectronics Systems Education
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Electrical study of microfluidic channels isolated with chemically modified porous silicon

2007 Physica Status Solidi (c)
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Nanoscale morphology dependent hydrogen coverage of meso-porous silicon

2004 Applied Surface Science
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Gas permeability of porous silicon nanostructures.

2004 Physical Review E
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Electrical barrier properties of meso-porous silicon

2003 Materials Science and Engineering B-advanced Functional Solid-state Materials
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Thermal isolation in microsystems with porous silicon

2002 Sensors and Actuators A-physical
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Porous Silicon in Microsystems: Thermal Isolation Applications

2001 Solid State Phenomena
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Micro-blood flow measurement using thermal conductivity micro-needles: a new CMOS compatible manufacturing process onto porous silicon

2000
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