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J Greuters
J Greuters
Optics
Reticle
Aerial image
Extreme ultraviolet
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4
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42
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RIM-13: A high-resolution imaging tool for aerial image monitoring of patterned and blank EUV reticles
2006
M Booth
A. Brunton
Julian S. Cashmore
Peter Elbourn
Graeme Elliner
Malcolm C. Gower
J Greuters
J. Hirsch
L Kling
N. McEntee
P. Richards
V. Truffert
I. Wallhead
M Whitfield
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Citations (1)
High-resolution EUV imaging tools for resist exposure and aerial image monitoring
2005
M Booth
O. Brisco
A. Brunton
Julian S. Cashmore
Peter Elbourn
Graeme Elliner
Malcolm C. Gower
J Greuters
Philipp Grunewald
R. Gutiérrez
T. Hill
J. Hirsch
L Kling
N. McEntee
S. Mundair
P. Richards
V. Truffert
I. Wallhead
M Whitfield
R. Hudyma
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Citations (36)
RIM-13: a high-resolution imaging tool for aerial image monitoring of EUV reticles
2005
M Booth
A. Brunton
Julian S. Cashmore
Peter Elbourn
Graeme Elliner
Malcolm C. Gower
J Greuters
J. Hirsch
L Kling
N. McEntee
P. Richards
V. Truffert
I. Wallhead
M Whitfield
R. Hudyma
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A completely laser-based production method for fibre Bragg grating devices
2003
Optics and Laser Technology
D. A. Barber
P Elbourn
J Greuters
N.H. Rizvi .
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Citations (5)
1