RIM-13: A high-resolution imaging tool for aerial image monitoring of patterned and blank EUV reticles
2006
Key features of the RIM-13 EUV actinic reticle imaging microscope are summarised. This is a tool which generates aerial images from blank or patterned EUV masks, emulating the illumination and projection optics of an exposure tool. Such images of mask defects, acquired by a CCD camera, are analysed using the tool software to predict their effect on resist exposure. Optical, mechanical and software performance of the tool are reported.
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