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Peter Elbourn
Peter Elbourn
Extreme ultraviolet
Extreme ultraviolet lithography
Engineering
Resist
Reticle
5
Papers
62
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RIM-13: A high-resolution imaging tool for aerial image monitoring of patterned and blank EUV reticles
2006
M Booth
A. Brunton
Julian S. Cashmore
Peter Elbourn
Graeme Elliner
Malcolm C. Gower
J Greuters
J. Hirsch
L Kling
N. McEntee
P. Richards
V. Truffert
I. Wallhead
M Whitfield
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Citations (1)
High-resolution EUV imaging tools for resist exposure and aerial image monitoring
2005
M Booth
O. Brisco
A. Brunton
Julian S. Cashmore
Peter Elbourn
Graeme Elliner
Malcolm C. Gower
J Greuters
Philipp Grunewald
R. Gutiérrez
T. Hill
J. Hirsch
L Kling
N. McEntee
S. Mundair
P. Richards
V. Truffert
I. Wallhead
M Whitfield
R. Hudyma
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Citations (36)
RIM-13: a high-resolution imaging tool for aerial image monitoring of EUV reticles
2005
M Booth
A. Brunton
Julian S. Cashmore
Peter Elbourn
Graeme Elliner
Malcolm C. Gower
J Greuters
J. Hirsch
L Kling
N. McEntee
P. Richards
V. Truffert
I. Wallhead
M Whitfield
R. Hudyma
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Citations (0)
High-resolution EUV microstepper tool for resist testing and technology evaluation
2004
A. Brunton
Julian S. Cashmore
Peter Elbourn
Graeme Elliner
Malcolm C. Gower
Philipp Grunewald
M. Harman
S Hough
N. McEntee
S. Mundair
D. Rees
P. Richards
V. Truffert
I. Wallhead
Mike Whitfield
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Citations (12)
High-resolution EUV Microstepper tool for resist testing and technology evaluation
2004
A. Brunton
Julian S. Cashmore
Peter Elbourn
Graeme Elliner
Malcolm C. Gower
Philipp Grunewald
M. Harman
S Hough
N. McEntee
S. Mundair
D. Rees
P. Richards
V. Truffert
I. Wallhead
M Whitfield
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Citations (13)
1