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Tinaung Maung
Tinaung Maung
Massachusetts Institute of Technology
Electronic engineering
Electrical measurements
Materials science
Circuit design
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3
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105
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Use of short-loop electrical measurements for yield improvement
1995
IEEE Transactions on Semiconductor Manufacturing
Crid Yu
Tinaung Maung
Costas J. Spanos
Duane S. Boning
James E. Chung
Hua-yu Liu
Keh-Jeng Chang
Dirk J. Bartelink
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Citations (51)
Statistical metrology for interlevel dielectric thickness variation
1994
Duane S. Boning
Tinaung Maung
James E. Chung
Keh-Jeng Chang
Soo-Young Oh
Dirk J. Bartelink
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Citations (6)
1