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ko toko sigehisa
ko toko sigehisa
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Sputtering
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Method of manufacturing a cylindrical sputtering target
2013
ko toko sigehisa
sigehisa ko toko
kousyou tamano
ken'iti itou
tetuo sibuta ken
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Cible cylindrique de pulvérisation et procédé pour sa fabrication
2009
Shigehisa Todoko
ko toko sigehisa
Kimiaki Tamano
kousyou tamano
Kenichi Itoh
ken'iti itou
Tetsuo Shibutami
tetuo sibuta ken
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