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Makonnen Payne
Makonnen Payne
Entegris
Materials science
Composite material
Tin
Metallurgy
Dielectric
5
Papers
5
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0
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High Throughput Wet Etch Solution for BEOL TiN Removal
2016
Solid State Phenomena
Chia Jung Hsu
Chieh Ju Wang
Sheng-Hung Tu
Makonnen Payne
Emanuel I. Cooper
Steven Lippy
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Evaluation of Post Etch Residue Cleaning Solutions for the Removal of TiN Hardmask after Dry Etch of Low-k Dielectric Materials on 45 nm Pitch Interconnects
2016
Solid State Phenomena
Makonnen Payne
Steven Lippy
Ruben R. Lieten
Els Kesters
Quoc Toan Le
Gayle Murdoch
Victor Vega Gonzalez
Frank Holsteyns
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Selective High-Throughput TiN Etching Methods
2012
Solid State Phenomena
Emanuel I. Cooper
Rekha Rajaram
Makonnen Payne
Steven Lippy
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All-Wet, Metal-Compatible High-Dose-Implanted Photoresist Strip
2012
Solid State Phenomena
George G. Totir
Mahmoud Khojasteh
Ronald W. Nunes
Emanuel I. Cooper
Matthew Kern
Kim Van Berkel
Makonnen Payne
Ronald A. DellaGuardia
Bang To
Siegfried L. Maurer
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Surfactant Adsorption at the Air-Liquid and Hydrophobic Solid-Liquid Interfaces: Unraveling the Mechanism for Superspreading
2007
Makonnen Payne
Charles Maldarelli
Alexander Couzis
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