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Chia Jung Hsu
Chia Jung Hsu
Entegris
Etch pit density
Dielectric
Composite material
Titanium nitride
Mixing ratio
1
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High Throughput Wet Etch Solution for BEOL TiN Removal
2016
Solid State Phenomena
Chia Jung Hsu
Chieh Ju Wang
Sheng-Hung Tu
Makonnen Payne
Emanuel I. Cooper
Steven Lippy
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