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Hiroshi Touda
Hiroshi Touda
Hitachi
Proximity effect (audio)
Reticle
Image stitching
Engineering
Critical dimension
2
Papers
4
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Technologies for electron-beam reticle writing systems for 130-nm node and below
2002
Genya Matsuoka
Hidetoshi Satoh
Akira Fujii
Kazui Mizuno
Tetsuji Nakahara
Suyo Asai
Yasuhiro Kadowaki
Hajime Shimada
Hiroshi Touda
Ken Iizumi
Hiroyuki Takahashi
Kazuyoshi Oonuki
Toshikazu Kawahara
Katsuhiro Kawasaki
Koji Nagata
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Advanced e-beam reticle writing system for next-generation reticle fabrication
2000
Akira Fujii
Kazui Mizuno
Tetsuji Nakahara
Suyo Asai
Yasuhiro Kadowaki
Hajime Shimada
Hiroshi Touda
Ken Iizumi
Hiroyuki Takahashi
Kazuyoshi Oonuki
Toshikazu Kawahara
Katsuhiro Kawasaki
Koji Nagata
Hidetoshi Satoh
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Citations (4)
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