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Jou Kikura
Jou Kikura
Osaka University
Materials science
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Tetrafluoroethylene
Torr
Tetrafluoromethane
2
Papers
1
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0
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Reactive ion etching process of SiO2 film using on-site synthesized C2F4 from CF4
2021
Japanese Journal of Applied Physics
Daiki Iino
Satoshi Tanida
Kazuaki Kurihara
Hiroyuki Fukumizu
Itsuko Sakai
Junko Abe
Jota Fukuhara
Rei Tanaka
Tomoyuki Tanaka
Jou Kikura
Hiroaki Kakiuchi
Kiyoshi Yasutake
Hiromasa Ohmi
Hisataka Hayashi
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On-site tetrafluoroethylene gas generation from moderate-pressure pure tetrafluoromethane plasma reactor
2020
Chemical Engineering Science
Hiromasa Ohmi
Jou Kikura
Tomoyuki Tanaka
Rei Tanaka
Daiki Iino
Itsuko Sakai
Kazuaki Kurihara
Hiroyuki Fukumizu
Junko Abe
Jota Fukuhara
Hisataka Hayashi
Hiroaki Kakiuchi
Kiyoshi Yasutake
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