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Min-Chul Chae
Min-Chul Chae
Samsung
Materials science
Analytical chemistry
Etching
Dry etching
Optics
3
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Superior ArF PR etching selectivity and via CD control using fluorocarbon polymer deposition technique for 45nm-node
2010
ICSICT | IEEE International Conference on Solid-State and Integrated Circuit Technology
Jong-Jin Park
Se-Il Sohn
Kwang-Ho En
Han-Ki Seo
Min-Chul Chae
Byoung-Goo Jeon
Sung-Il Kim
Young Wook Park
Chil-Ki Lee
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New Dry Etching Process of the Deep Contact Composed of SiO2 and Si Layer by using the Triple Hard Mask System
2007
Woojin Cho
Jun Seo
Y. M. Kang
Min-Chul Chae
Sung-Un Kwon
Jae-seung Hwang
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Characteristics of in-situ chamber cleaning for DPS+ metal etcher by using optical emission spectroscopy
2006
Bulletin of the American Physical Society
Yong-Hwan Ryu
Woojin Cho
Yongwoo Lee
Min-Chul Chae
Sung-Un Kwon
Jae-seung Hwang
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