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Xiaoping Shi

Katholieke Universiteit Leuven

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Partial Wetting of Aqueous Solutions on High Aspect Ratio Nanopillars with Hydrophilic Surface Finish

2014 ECS Journal of Solid State Science and Technology
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Key contributors for improvement of line width roughness, line edge roughness, and critical dimension uniformity: 15 nm half-pitch patterning with extreme ultraviolet and self-aligned double patterning

2013 Journal of Micro-nanolithography Mems and Moems
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