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Im-soo Park
Im-soo Park
Samsung
Materials science
Metal gate
Optoelectronics
NMOS logic
MOSFET
4
Papers
3
Citations
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Development of a New TaN Etchant for Metal Gate
2007
Solid State Phenomena
Mong Sup Lee
Sang-Yong Kim
Ji-Hoon Cha
Jeong-Nam Han
Im-soo Park
Kun-tack Lee
Chang Ki Hong
Han-Ku Cho
Joo-Tae Moon
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Effect of Ashing, Strip and Annealing Process on the Dopant Concentration of Silicon
2007
Mong Sup Lee
Im-soo Park
Dae-hyuk Kang
Dong-Gyun Han
Yoon-ho Son
Kun-tack Lee
Chang Ki Hong
Chang Jin Kang
Joo-Tae Moon
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Meeting the Critical Cleaning Challenges for 65 nm and Beyond Using a Single Wafer Processing with Novel Megasonics and Drying Technologies
2006
Yongqiang Lu
Im-soo Park
Suk Koo Choi
Chang Ki Hong
Han-Ku Cho
Evanson G. Baiya
John Rosato
Rao Yalamanchili
Eric Hansen
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Highly Manufacturable TiN Metal Gate Nanorod Transistors Realized on Silicon-On-ONO (SOONO) Substrate
2006
IEDM | International Electron Devices Meeting
Sung Hwan Kim
Chang Woo Oh
Yong-lack Choi
S.J. Hong
Na Young Kim
Hyun Jun Bae
Sung Han Kim
Heung Sik Park
Je Bum Yoon
Im-soo Park
Dong-Won Kim
Donggun Park
Byung-Il Ryu
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